February 27 - March 4, 2011    San Jose CA , USA
SPIE Advanced Lithography is the internationally recognized forum for reporting state-of-the-art research and development in optical lithography, resists, metrology, EUV, immersion, double patterning, DFM, and imprint lithography

SPIE Advanced Lithography draws over 4,000 attendees and 140 exhibitors, representing the most talented researchers and managers working in the lithography industry. Leading experts offer courses that will keep you and your team current.

Featuring presentations on:

+ Alternative Lithographic Technologies
+ Metrology, Inspection, and Process Control for Microlithography
+ Advances in Resist Materials and Processing Technology
+ Optical Microlithography
+ Design for Manufacturability through Design-Process Integration

Venue

Location: San Jose Convention Center
As the flagship of San Joses convention facilities, the San Jose Convention Center will be the focal point of your meeting, a hub of activity and excitement where your attendees will converge. From..
Contact 408 Almaden Blvd. San Jose , USA
(408) 295-9600

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