March 25 - 27, 2014
The 27th International Conference on Microelectronic Test Structures will be held in Udine, Italy, bringing together scientists, technicians, designers and users of characterization techniques and test structures to discuss recent developments and future directions. The conference will take place on March 25-27, 2014, preceded by a one-day Tutorial Short Course on Microelectronic Test Structures on March 24.

An Equipment exhibition related to electron device measurements and characterization techniques will be held during the conference days. Equipment vendors and manufacturers interested to participate can mail Dr. Alain Toffoli (Exhibition chair).

Publications and Awards
Accepted papers will be published in the Conference Proceedings (on paper) and on IEEExplore.
A limited number of the best oral papers presented at the conference will be selected for publication in a special issue with peer review of IEEE Transactions on Semiconductor Manufacturing.
A Best Paper award will be presented by the Technical Program Committee.

Venue

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