IEEE International Conference on Micro Electro Mechanical Systems (MEMS) 2014

Over the last twenty-five years, the IEEE MEMS Conference series has been a flagship annual event in the MEMS area. The 27th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2014) will be held to report research and development results on every aspect of MEMS and Microsystems Technology, reflecting the strong commitment and continuing success of the international community. In recent years, the IEEE MEMS Conference has created the forum for over 200 top-quality papers, selected from over 800 abstract submissions, in non-overlapping oral and poster sessions, and attracted more than 700 participants. Its single-session format provides ample opportunity for strong interaction between attendees, presenters and exhibitors. MEMS 2014 will be held in San Francisco, California, USA, from January 26 - 30, 2014. The major areas of activity in the MEMS research solicited and expected at this conference include but are not limited to:

Design, simulation and analysis tools with experimental verification

Fabrication technologies and processes

Silicon and non-silicon materials

Electro-mechanical integration techniques

Assembly and packaging approaches

Metrology and operational evaluation techniques

System architecture

Reliability for commercialization