Conference · Costa Mesa, California
SPIE Photomask Technology
Electronics · Semiconductor · Engineering
Key numbers
- Editions on record
- 6first in 2010
About SPIE Photomask Technology
The SPIE Photomask Technology Symposium, organized by SPIE and BACUS, the International Technical Group of SPIE, provides the world’s largest forum to discuss the latest mask technologies and how they can meet the needs of the rapidly moving semiconductor industry. Co-located with SPIE Scanning Microscopy 2015, a multidisciplinary conference for advancing scanning microscopy technologies and applications.
Mask Making
+ Mask data preparation
+ Substrates and materials
+ Patterning tools and processes
+ Resist and resist processing
+ Etch techniques
+ Metrology
+ Inspection
+ Repair
+ Cleaning, contamination, and haze
+ Simulation of mask making
9-inch Glass
+ Impact of 450mm wafers on reticle and infrastructure
+ Tool developments to support larger blanks
+ Material developments
Mask Business
+ EUV mask making
+ EUV mask inspection and repair
+ EUV mask infrastructure
+ EUV mask application
+ Nanoimprint mask making
+ Nanoimprint mask application
+ Pixelated masks
+ Alternative mask technologies
+ Grey-scale masks
+ Direct-write, ML²
From our listing of this edition. Details may have changed since.
Editions
| Year | Dates | Where | Exhibitors | Visitors |
|---|---|---|---|---|
| 2015 | 29 Sep – 1 Oct 2015 | Monterey Conference Center Costa Mesa, California | — | — |
| 2014 | 16–18 Sep 2014 | Monterey Conference Center Costa Mesa, California | — | — |
| 2013 | 10–12 Sep 2013 | Monterey Conference Center Costa Mesa, California | — | — |
| 2012 | 11–13 Sep 2012 | Monterey Conference Center Costa Mesa, California | — | — |
| 2011 | 19–22 Sep 2011 | Monterey Conference Center Costa Mesa, California | — | — |
| 2010 | 13–16 Sep 2010 | Monterey Conference Center Costa Mesa, California | — | — |
Past editions from the bvents archive (2008–2019) and organiser figures where they were published.
Questions
When is SPIE Photomask Technology?
The next dates haven't been confirmed. The last edition we have on record was 29 Sep – 1 Oct 2015.
Where is it held?
The last edition we have was at Monterey Conference Center, Costa Mesa, California.
How often does it take place?
Annual, judging by the 6 editions on record since 2010.