Expo and conference · San Jose, California
SPIE Advanced Lithography 2010
Optics, Precision Mechanics, Laser · Semiconductor
Dates21–26 Feb 2010This edition has ended
RunningSince 2010Irregular · 7 editions on record
Last checked11 Nov 2026Organiser website checked
This is the 2010 edition. It has ended. See SPIE Advanced Lithography's current page for the next dates.
Key numbers
- Editions on record
- 7first in 2010
About SPIE Advanced Lithography
EUV—sources, components, yields, resists, modeling
• Alternative Technologies—maskless, nano-imprint, directed self-assembly
• Optical lithography—computational, double patterning, SMO, OPC, RET
• Metrology, inspection, process control, LER/LWR, mask litho, DBM
From our listing of this edition. Details may have changed since.
Editions
| Year | Dates | Where | Exhibitors | Visitors |
|---|---|---|---|---|
| 2018 | 25 Feb – 1 Mar 2018 | San Jose Convention Center San Jose, California | — | — |
| 2016 | 21–25 Feb 2016 | San Jose Marriott Hotel San Jose, California | — | — |
| 2015 | 22–26 Feb 2015 | San Jose Convention Center San Jose, California | — | — |
| 2014 | 23–27 Feb 2014 | San Jose Convention Center San Jose, California | — | — |
| 2012 | 12–16 Feb 2012 | San Jose Convention Center San Jose, California | — | — |
| 2011 | 27 Feb – 4 Mar 2011 | San Jose Convention Center San Jose, California | — | — |
| 2010 | 21–26 Feb 2010 | San Jose Convention Center San Jose, California | — | — |
Past editions from the bvents archive (2008–2019) and organiser figures where they were published.