Expo and conference · San Jose, California

SPIE Advanced Lithography Exhibition 2015

Optics, Precision Mechanics, Laser · Semiconductor

Official website
Dates22–26 Feb 2015This edition has ended
VenueSan Jose Convention CenterSan Jose, California
RunningSince 2010Irregular · 7 editions on record
Last checked11 Nov 2026Organiser website checked
This is the 2015 edition. It has ended. See SPIE Advanced Lithography's current page for the next dates.

Key numbers

Editions on record
7first in 2010

About SPIE Advanced Lithography

The Advanced Lithography Exhibition is a highly regarded exhibition for the industry's top semiconductor suppliers, integrators, and manufacturers. SPIE Advanced Lithography has been the premier international event that drives the future of lithography research and applications for 40 years.

See the latest technology in advanced lithography:

+ Lithography: immersion, double patterning, e-beam, EUV, optical/laser, and RET

+ Metrology, inspection, OPC, and process control

+ Design and manufacturing software

+ Materials and chemicals

+ Imaging equipment

+ Lasers

+ Resist materials and processing

+ Nano-imprint

+ IC and chip fabrication

+ Etch for nanopatterning

+ Nanoscale imaging

Exhibition Dates and Hours:

Tuesday 24 February 2015 | 10:00 am to 5:00 pm

Wednesday 25 February 2015 | 10:00 am to 4:00 pm

From our listing of this edition. Details may have changed since.

Editions

YearDatesWhereExhibitorsVisitors
201825 Feb – 1 Mar 2018San Jose Convention Center
San Jose, California
——
201621–25 Feb 2016San Jose Marriott Hotel
San Jose, California
——
201522–26 Feb 2015San Jose Convention Center
San Jose, California
——
201423–27 Feb 2014San Jose Convention Center
San Jose, California
——
201212–16 Feb 2012San Jose Convention Center
San Jose, California
——
201127 Feb – 4 Mar 2011San Jose Convention Center
San Jose, California
——
201021–26 Feb 2010San Jose Convention Center
San Jose, California
——

Past editions from the bvents archive (2008–2019) and organiser figures where they were published.

Industries