Expo and conference · San Jose, California
SPIE Advanced Lithography
Optics, Precision Mechanics, Laser · Semiconductor
Key numbers
- Editions on record
- 7first in 2010
About SPIE Advanced Lithography
2017 conference topic areas:
• Extreme Ultraviolet (EUV) Lithography
• Emerging Patterning Technologies
• Metrology, Inspection, and Process Control for Microlithography
• Advances in Patterning Materials and Processes
• Optical Microlithography
• Design-Process-Technology Co-optimization for Manufacturability
• Advanced Etch Technology for Nanopatterning
From our listing of this edition. Details may have changed since.
Editions
| Year | Dates | Where | Exhibitors | Visitors |
|---|---|---|---|---|
| 2018 | 25 Feb – 1 Mar 2018 | San Jose Convention Center San Jose, California | — | — |
| 2016 | 21–25 Feb 2016 | San Jose Marriott Hotel San Jose, California | — | — |
| 2015 | 22–26 Feb 2015 | San Jose Convention Center San Jose, California | — | — |
| 2014 | 23–27 Feb 2014 | San Jose Convention Center San Jose, California | — | — |
| 2012 | 12–16 Feb 2012 | San Jose Convention Center San Jose, California | — | — |
| 2011 | 27 Feb – 4 Mar 2011 | San Jose Convention Center San Jose, California | — | — |
| 2010 | 21–26 Feb 2010 | San Jose Convention Center San Jose, California | — | — |
Past editions from the bvents archive (2008–2019) and organiser figures where they were published.
Questions
When is SPIE Advanced Lithography?
The next dates haven't been confirmed. The last edition we have on record was 25 Feb – 1 Mar 2018.
Where is it held?
The last edition we have was at San Jose Convention Center, San Jose, California.
How often does it take place?
Irregular, judging by the 7 editions on record since 2010.