Expo and conference · San Jose, California
SPIE Advanced Lithography 2016
Optics, Precision Mechanics, Laser · Semiconductor
Key numbers
- Editions on record
- 7first in 2010
About SPIE Advanced Lithography
SPIE Advanced Lithography draws more than 2,300 attendees, 50 exhibitors, and 600 technical papers representing the most talented researchers and managers working in the lithography industry. Leading experts offer courses that will keep you and your team current.
Featuring presentations on:
+ Extreme Ultraviolet (EUV) Lithography
+ Alternative Lithographic Technologies
+ Metrology, Inspection, and Process Control for Microlithography
+ Advances in Patterning Materials and Processes
+ Optical Microlithography
+ Design-Process-Technology Co-optimization for Manufacturability
+ Advanced Etch Technology for Nanopatterning
Exhibition: Advanced Lithography Exhibition, the industry's most important event for lithography R&D, devices, tools, fabrication, and services.
From our listing of this edition. Details may have changed since.
Editions
| Year | Dates | Where | Exhibitors | Visitors |
|---|---|---|---|---|
| 2018 | 25 Feb – 1 Mar 2018 | San Jose Convention Center San Jose, California | — | — |
| 2016 | 21–25 Feb 2016 | San Jose Marriott Hotel San Jose, California | — | — |
| 2015 | 22–26 Feb 2015 | San Jose Convention Center San Jose, California | — | — |
| 2014 | 23–27 Feb 2014 | San Jose Convention Center San Jose, California | — | — |
| 2012 | 12–16 Feb 2012 | San Jose Convention Center San Jose, California | — | — |
| 2011 | 27 Feb – 4 Mar 2011 | San Jose Convention Center San Jose, California | — | — |
| 2010 | 21–26 Feb 2010 | San Jose Convention Center San Jose, California | — | — |
Past editions from the bvents archive (2008–2019) and organiser figures where they were published.